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镀膜仪
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Product Details
CCU-010 LV (low vacuum) coating unit
Consisting of:
lightweight Aluminum base
vacuum flange (DN 25 ISO-KF) to connect an external roughing pump
power socket and cable to control the external roughing pump
Pirani vacuum gauge
automatic valve control for two process gases and venting
6mm plug connections for two process gases and vent gas
glass process chamber (DN 100 ISO-KF compatible) with a scale indicating the working distance
implosion guard with safety monitoring
specimen table, tilt and height adjustable
specimen plate Ø 80mm for SEM pin stubs
quartz crystal film thickness monitor, usable in two positions (center/edge)
power supply (100 … 240VAC, 50/60Hz)
process head interface (gas and electric) including automatic detection
5.7“ TFT touch display
an easy creation of the coating recipes which guarantee reproducible results
storage / view of the last ten processes
Automatic vent of the system with power failure.This prevents dirtying the arrangement by the oil of the backing pump. The battery-buffered vent valve
closes after venting to avoid extensive loss of venting gas.
intuitive operator's software with many practical features
graphic representation of process data with Windows based software Coating LAB (option)
external alarm connector
USB service interface for easy analysis and software upgrades
various accessories, tools and assembly material included in delivery
operating manual
Product appearance