Product Details

Tergeo-EM is an all-in-one laboratory plasma cleaning, etching and surface treatment system.

Technical specifications

1.Integrated direct/immersion and remote/downstream cleaning modes

2.Plasma sensor for real time plasma intensity measurement

3.Pulsed operation for millisecond short pulse .

4.All-in-one laboratory plasma etching, treatment and cleaning system.

5.Large sample chamber for batch processing. Quartz tube ID:110mm, depth 280mm, with a rectangular quartz sample tray (100mmX250mm) to hold batch of samples.

6.Dual TEM rod adapter, can be configured to support TEM rods from two different vendors.

Product appearance

Application example