PIE plasma cleaners EM-KLEEN-EM-KLEEN-Zhenjiang Lehua Technology Co.,Ltd

Product

AUTOCUTS
- Automatic Collector for Ultra-Thin Section
- Grinding Silicon Wafer
- Black Collection Belt
- Brown Collection Belt
CCD camera
- NanoSprint1200 sCMO
- NanoSprint43 Mk-II CMOS
- NanoSprint15 Mk-II
CryoMatrix® holey Grid
- CryoMatrix-Carbon Film
- CryoMatrix-Amorphous Alloy Film
Magnetic Field Cancelling System
- Tokkyokiki Magnetic Field Cancelling System
Vibration Isolation System
- Tokkyokiki Active Vibration Isolation System
HATA-Holder System
- Mul Build HATA-Holder System
- Double tilt LN2 Atoms Defend Holder
PIE plasma cleaners
- EM-KLEEN
- Tergeo-EM
Nexperion SentineL
- Nexperion SentineL
WET-SEM
- SEM Sample Room QX-102
- SEM Sample Room QX-202
- SEM Sample Room QX-302
- SEM Sample Room Accessory
Temassist-Towards Automatic TEM solutions
- Temassist-Towards Automatic TEM solutions
FEG and LaB6 filament
- FEG and LaB6 filament
Compressors
- JUN Air
Chiller
- LabTech HF500 split Chiller
Vacuum System
- Edwards Ion pump
- Pfeiffer Turbomolecular Pumps
- Pfeiffer Vacuum gauge
- Pumping Station
High-vacuum Optical Platform for cryo-CLEM
- HOPE V1
Quick Freeze Substitution Equipment
- Quick Freeze Substitution Equipment
Agar Auto Sputter Coater
- Agar Auto Sputter Coater
Coating instrument
- Coating instrument
Cryo-FIB sample preparation
- Cryo-FIB sample preparation
Nanometer Pattern Generation System
- Nanometer Pattern Generation System

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EM-KLEEN

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PIE plasma cleaners EM-KLEEN

Product Details

Used for SEM, FIB, XPS and ALD vacuum analysis and coating equipment for hydrocarbon contamination cleaning, supporting ZEISS, HITACHI, JEOL, FEI, TESCAN, SPECS systems.

Technical specifications

Working pressure: sample chamber: 0.1-2.5 mTorr, compatible with molecular pump

Power Supply: 13.56MHz 75Wattt RF

Product appearance

Application example

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