- AUTOCUTS
- CCD camera
- CryoMatrix® holey Grid
- Magnetic Field Cancelling System
- Vibration Isolation System
- HATA-Holder System
- PIE plasma cleaners
- Nexperion SentineL
- WET-SEM
- Temassist-Towards Automatic TEM solutions
- FEG and LaB6 filament
- Compressors
- Chiller
- Vacuum System
- High-vacuum Optical Platform for cryo-CLEM
- Quick Freeze Substitution Equipment
- Agar Auto Sputter Coater
- Coating instrument
- Cryo-FIB sample preparation
- Nanometer Pattern Generation System
Product Details
It is a pressure-driven multifunctional nanoimprint machine, with hot embossing and UV embossing function, maximum support 6 inches imprint template. The addition of PDMS、SFP? & Hybrid Mold? soft template imprint technology can eliminate defects of imprinting results caused by dust at maximum extent, and support surfaces imprint . Currently LH-150 has been widely used in graphical sapphire substrate, solar cells, optical waveguide devices, biochips and other areas.
Technical specifications
|
Model name |
NIL100 |
|
Dimensions |
500mm(L)*650mm(W)*950mm(H) |
|
Weight |
150 kg |
|
Sample size |
Up to 4” circle |
|
Imprint mode |
Thermal imprint, UV imprint |
|
Power supply |
220V 50Hz |
|
Power consumption |
1.0kW |
|
Vacuum level |
-95kPa |
|
Imprint pressure |
Up to 8bar |
|
Temperature control Heating method Cooling method Temperature range |
220V,500W heating wire Air cool Room temperature--250℃ |
|
UV lamp |
250W mercury lamp, 365nm |
|
Control system |
PLC interface |
|
Noise level |
≤70dB |
|
Facility requirement |
Clean room, temperature 0-38℃ |
